Inductivecoupledplasma相关论文
Room temperature silicon oxide deposition by neutral beam assisted high density inductive coupled pl
A novel room temperature deposition process for silicon oxide (SiOx) thin films was developed using neutral beam assiste......
Hydrogen plasma induced crystallization of Si∶H thin films by remote inductive coupled plasma source
Hydrogenated microcrystalline silicon thin films (μc-Si∶H) were deposited by remote inductive coupled plasma (ICP) ass......
